The semiconductor industry requires a great deal of precision in terms of purity and process control. Installing a vacuum system will facilitate control against contamination as well as pressure and temperature fluctuations at different crucial stages such as deposition, etching, and cleaning. The fittings used in such systems should be specifically designed to enable leak-tight seals to ensure maximum operational safety and production efficiency.
Fittings such as VCO O-Ring Face Seal fittings and VCR Metal Gasket Face Seal fittings provide maximum purity for a wide range of applications that require a vacuum-tight seal. Today, we will compare VCO vs. VCR fittings to help you identify the ideal fitting for your ultra-high purity application.
VCO and VCR fittings are both assets for applications that require extreme process control. In vacuum or high-temperature applications, these fittings provide a leak-tight seal to control particulates, which can significantly affect the yield. But to understand these fittings and when to use them, we need to take a look at their differences in terms of their build and their usage.
The table below compares VCO vs. VCR fittings.
VCO O-Ring Face Seal Fitting vs. VCR Metal Gasket Face Seal Fitting Fittings |
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VCO O-Ring Face Seal Fitting
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VCR Metal Gasket Face Seal Fitting
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Feature |
O-ring face seal |
Metal to metal face seal |
Clearance |
No axial clearance required |
Very minimal clearance required |
Assembly opitions |
Gland + body + nut |
Female nut + glands (1 or 2) + gasket + body |
Application |
For non-corrosive media—corrosion can be an issue on the O-ring |
Suitable when media is corrosive or for high-temperature applications |
Temperature rating |
Maximum temperature rating is 550°F (perfluoroelastomer) |
Maximum temperature rating is 1000°F (316/316L stainless steel) |
Despite the difference, these VCO and VCR fittings are similar in terms of installation and accessibility. They can be easily installed without the need for specialized tools. For maintenance, repairs, and upgrades, they can be easily disassembled without requiring the removal of multiple other components.
Making the right selection from VCO vs. VCR fittings is necessary to gain efficient output in your semiconductor manufacturing process. There are also several other benefits that these fittings offer, including:
Swagelok’s VCO and VCR fittings are ideal for high-purity applications in semiconductors and a wide range of other industries. In high-vacuum or low-pressure environments, as may be required in semiconductor deposition, etching, or cleaning processes, these fittings can provide a leak-tight seal when joining different vacuum system components.
It is crucial to make the selection of VCO vs. VCR fittings based on application-specific requirements such as temperature and pressure capabilities, size range, and material compatibility, as well as sealing, assembly, and media requirements. The correct fitting choice is the key to your semiconductor manufacturing process's smooth and efficient operation.
To find out more about how Swagelok Northern California can help you make a selection between single ferrule vs. double ferrule tube fittings for your fluid system installation, contact our team today by calling 510-933-6200.
Morgan holds a Bachelor of Science in Mechanical Engineering from University of California at Santa Barbara. He is certified in Section IX, Grab Sample Panel Configuration and Mechanical Efficiency Program Specification (API 682), and he is well versed in B31.3 Process Piping Code. Before joining Swagelok Northern, he was a manufacturing engineer at Sierra Instruments, primarily focused on capillary thermal meters for the semiconductor industry (ASML).