Fluid System Components for the Semiconductor Manufacturing Process

The different chemicals and gases used in semiconductor manufacturing require a robust fluid system for uninterrupted supply at each stage of production. These fluid systems must be capable of supporting the extreme process conditions required for semiconductor manufacturing while ensuring a clean, leak-free, and controlled process. Thus, the choice of fluid system components holds critical importance in the precision semiconductor manufacturing process.

Selecting high-quality fluid system components is synonymous with improving manufacturing efficiency and reducing system downtime. Regarding the semiconductor manufacturing process, we will discuss the critical roles of fluid system components and the importance of their reliability.

The Importance of Fluid System Components in Semiconductor Manufacturing

Fluid system components in semiconductor manufacturing include the different chemical mixing, delivery, and control systems for safely transporting chemical fluids in a controlled environment. The ideal fluid system offers:

Only the highest quality components can provide such ideal conditions in a semiconductor fluid system. The advantages of using such components include:

1. Precision: Components such as valves, regulators, and pumps work in unison to ensure the right proportions of chemicals are delivered to the production unit. Precision input eliminates the risk of flow rate variation, thus, enhancing the quality of the final product.
2. Compatibility and Cleanliness: Fluid system components that have a compatible material composition with the process fluid reduce the risk of contamination. Additionally, a leak-free installation of these fluid systems components reduces particulate impurities, providing a clean and controlled manufacturing environment for a higher yield. 
3. Safety: The gases and chemicals used for semiconductor manufacturing can be hazardous to humans health. However, fluid system components designed to prevent leaks and spills can deliver these fluids to the production unit in a safe and controlled manner.
4. Efficiency: A leak-free build and precision control from high-quality fluid system components minimize operational downtime and frequent maintenance requirements, facilitating smooth and efficient manufacturing to meet production targets. 

Fluid System Component Solutions For Quality Manufacturing

Fluid system components require a quality installation to address the various challenges of semiconductor manufacturing. The major components that make an impact on the fabs include:  

1. Valves: High-performance valves, such as the diaphragm, bellow, or needle valves, can ideally regulate the fluid flow in a fabrication facility. Quality valves are durable and provide precision and control to improve the efficiency of the production and handling process for critical semiconductor manufacturing. 
2. Fittings: High-purity fittings for tubes and hose systems and other critical components provide leak-tight connections to enhance the safety and purity of the fluid system components. 
3. Hoses: For delicate fabrication requirements, insulated hoses facilitate thermal management so the process conditions inside the production chamber can be optimally maintained. This is extremely important as the slightest fluctuation in temperature can damage the chip, incurring production waste. 
4. Flexible Tubings: Where conditions allow, flexible tubings can be used to reduce the number of fittings in the fluid system assembly. The tubes are bent to achieve the desired route for the fluid. Fewer fittings mean a reduced risk of leaks and damage due to vibrations and shifting. 
5. Regulators: Regulators can effectively control the pressure at each phase of the semiconductor manufacturing process. The constant and precise flow rate allows for a consistent and quality yield while avoiding wasted fluid chemicals and exotic materials.
6. Filters: A single particulate can affect the performance of the semiconductor. The use of ultra-high purity filters eliminates particulate contamination and minimizes damage to the chip.

With Swagelok’s wide range of high-quality valves, fittings, regulators, hoses, and filters, it is possible to achieve fluid system efficiency in the semiconductor manufacturing process. 

Achieve Manufacturing Efficiency With High-Quality Components From Swagelok

Swagelok’s ultra-high purity (UHP) components ensure process control for effective fluid system performance. In addition, you can also leverage the on-site service from Swagelok, which allows you to examine your existing fluid system plan and optimize it if needed. Our fluid system experts will recommend the right components and provide expertise regarding the optimal installation and maintenance practice for your fluid delivery system.

To find out more about how Swagelok Northern California can make your semiconductor manufacturing process safe and efficient, contact our team today by calling 510-933-6200.

About Morgan Zealear | Product Engineer, Assembly Services

Morgan holds a Bachelor of Science in Mechanical Engineering from University of California at Santa Barbara. He is certified in Section IX, Grab Sample Panel Configuration and Mechanical Efficiency Program Specification (API 682), and he is well versed in B31.3 Process Piping Code. Before joining Swagelok Northern, he was a manufacturing engineer at Sierra Instruments, primarily focused on capillary thermal meters for the semiconductor industry (ASML).