Semiconductor Vacuum Systems: The Importance of High-Quality Components for Cleanliness

Semiconductor fabrication requires the utmost purity in all stages of production. The requirements for precision in material deposition, etching, photolithography, and other involved steps in wafer fabrication means that fabs must have a quality system and components in place that provide the highest cleanliness standard.

During wafer fabrication, strict precision is required to ensure vacuum, atmospheric pressure, and flow control. Using high-quality components from Swagelok will help achieve the process conditions desired for semiconductor vacuum systems. 

Cleanliness and Vacuum Technology in Semiconductor Manufacturing

The importance of cleanliness cannot be overstated in the semiconductor industry. A single speck of dust can degrade the quality and performance of the semiconductor. This is a high-priority concern for manufacturers given the increasing complexity and capability of the semiconductor in a wide range of industries. Clean room designs and vacuum systems have thus been adapted keeping the purity concern in mind.

Semiconductor vacuum systems, in particular, are used at various stages of manufacturing with the aim to:

• Reduce impurities to prevent contamination
• Lower the pressure to facilitate the uniformity of wafer placement
• Lower the temperature to prevent wafer deformation

Vacuum systems are a way to ensure strict control of low-pressure and sanitary conditions. Vacuum pumps evacuate the gases present in the interior of the processing chamber to bring the pressure down to the desired level. The pressure can be established at 7.5-8mTorr or lower for an ultra-high purity vacuum system.

Once all the atmospheric gasses are removed, the specialty gases such as nitrogen, argon, and helium are introduced. The inertness of these gases means they provide a clean environment for semiconductor processing and prevent unnecessary chemical reactions for a more productive operation. The productivity can be further enhanced by recovering and recycling higher-level gases (i.e., argon, helium).

For effective pressure control, gas input, and exhaust control in the vacuum chamber, it is essential that there are components in place that support leak-free and sanitary handling of the process gas.  

High-Quality Components for Semiconductor Vacuum Systems

In applications requiring ultra-high purity, it is impossible to compromise the need for process control and leak-tight sealing. The semiconductor OEMs and fabs can use high-quality fittings that provide a reliable connection for all gas distribution and evacuation systems. These fittings materials must be compatible to work with a wide range of fluids and have a smooth finish to support cleanliness.

The components, such as the vacuum face seal and tube fittings from Swagelok, are ideal for maintaining standards for semiconductor vacuum systems.

The advantage of these fittings is that the metal-to-metal sealing is much more reliable than the elastomer o-ring sealing, which can degrade when used with corrosive fluid. The leak-preventive performance of these fittings is highly beneficial for maintaining process control in semiconductor vacuum chambers.

Let’s summarize the features that Swagelok vacuum fittings offer:

1. Leak-tight performance to ensure there is no pressure fluctuation or contaminant introduction along the way
2. Easy installation and maintenance for efficient assembly and reduced operational downtime
3. Design that eliminates the chances of fluid entrapment 
4. 304/316 stainless steel for resistance against corrosion
5. Electropolished finishing for improved cleanliness
6. Compliance to ASME G93: Standard Practice for Cleaning Methods and Cleanliness Levels for Material and Equipment Used in Oxygen-Enriched Environments

Semiconductor Vacuum Systems: Maintain High Purity With Swagelok Fittings

Maintaining the purity of operation in clean rooms or vacuum chambers comes down to the performance of every single component in play. For example, in the evacuation or supply lines in the gas distribution panel, quality fittings must be used for process control during wafer fabrication. The ultra-high purity vacuum fittings from Swagelok prevent corrosion and contamination and have leak-proof details to ensure that your semiconductor manufacturing process runs smoothly.

As a local expert, Swagelok will also help you find the components that best fit the requirement for your gas delivery system. Through quality products and expert consultation, Swagelok will help you achieve an excellent standard for cleanliness for your semiconductor vacuum systems. 

To find out more about how Swagelok Northern California can help you maintain excellence in cleanliness and process control for your semiconductor vacuum systems, contact our team today by calling 510-933-6200.

About Morgan Zealear | Product Engineer, Assembly Services

Morgan holds a Bachelor of Science in Mechanical Engineering from University of California at Santa Barbara. He is certified in Section IX, Grab Sample Panel Configuration and Mechanical Efficiency Program Specification (API 682), and he is well versed in B31.3 Process Piping Code. Before joining Swagelok Northern, he was a manufacturing engineer at Sierra Instruments, primarily focused on capillary thermal meters for the semiconductor industry (ASML).