The transportation of fluids within a facility plays a significant role in the semiconductor manufacturing process. Thus, it requires a system of industrial process piping, tubing, and components that adhere to industrial standards. During the design and installation of such a system, it is essential to understand the operational process conditions, which serve as a guide for selecting proper materials—using high-quality components is the key to operational safety and reliability.
The stakes for fluid component selection and operation are high in the semiconductor industry. In addition to the precision required for process parameters such as temperature, pressure, and flow rate, semiconductor fabs also demand extreme purity from their fluid system. Today, we will explore these requirements of the semiconductor industry and discuss the role of quality components.
The industrial process piping, tubing, and fittings in semiconductor manufacturing have to undergo intense scrutiny before they are deemed suitable for use. From requiring extreme purity to precision flow control, the fluid transfer components must meet many requirements outlined in the chart below.
|
Requirement |
Resolution |
|
|
Purity requirement |
The slightest amount of contaminant can negatively affect the performance and reliability of microchips. For the chemicals and gases in use, the purity requirement is usually between 99.998% to 99.99994%. |
Using non-corrosive and high-purity materials such as stainless steel for piping and tubing systems. A filtration system also minimizes the potential for contamination. |
|
Flow control requirement |
Chemicals, liquids, and gases must be delivered to the processing unit at a controlled flow rate and meet temperature and pressure specifications. Vacuum flow control is another consideration. Things are much tougher under vacuum or sub-atmospheric, whereas any positive pressure = multiplicative increases vs. logarithmic decreases (vacuum). So TL;DR vacuum is harder than pressure to work with. |
Using flow control devices such as regulators, control valves, and flow meters for pressure control and insulation for temperature control. |
|
Safety requirement |
The chemicals and gasses in use can be hazardous or flammable. The fluid system should be installed so there is no risk of leaks or failures. |
Material selection, design, and installation should align with the ASME B 31.3 code. |
As mentioned above, it is essential for the fluid distribution and supply system in the semiconductor industry to use the highest quality materials, ensure proper alignment and connection, and maintain compliance with safety and quality standards.
Often, meeting safety and installation standards for industrial process piping in the semiconductor industry can be challenging. Particularly in cleanroom conditions, strict control of personnel, equipment, and environmental factors is required to keep the process piping and tubing free from contaminants. The issues generally stem from:
To maintain compliance with your fluid system's design and safety guidelines, it is crucial to consult with an expert. For semiconductor fabs across Northern California, Swagelok can help you select industrial process piping, tubing, and components, while also helping to optimize your design to achieve precision and reliability.
Swagelok offers a wide range of tubing selections and fitting offerings for your industrial process piping assembly. For the semiconductor industry, Swagelok offers specialized ultra-high purity (UHP) tubings, valves, and fittings. In addition, Swaglok also offers insulated tubings, filtration systems, and other control units for regulating the process conditions for safe operation. You can also leverage the consultation service from our experts for the efficient design and optimization of your chemical processing and gas distribution system.
Trust Swagelok to help you overcome the design and assembly challenges of your industrial process piping project, all while boosting safety and reliability.
To find out more about how Swagelok Northern California can help you overcome design and assembly challenges for industrial process piping, tubing, and components, contact our team today by calling 510-933-6200.
Morgan holds a Bachelor of Science in Mechanical Engineering from University of California at Santa Barbara. He is certified in Section IX, Grab Sample Panel Configuration and Mechanical Efficiency Program Specification (API 682), and he is well versed in B31.3 Process Piping Code. Before joining Swagelok Northern, he was a manufacturing engineer at Sierra Instruments, primarily focused on capillary thermal meters for the semiconductor industry (ASML).