Developing Fluid Product Systems in Semiconductor Cleanroom Designs

Semiconductor OEMs face the constant challenge of design innovation, with the complexity of fabrication further exacerbating this challenge. From requiring cleanroom designs for contamination prevention to the complex distribution system for controlled gas delivery, operators must keep multiple factors in check during chip fabrication.

The role of high-quality components for gas distribution and thermal management, thus, becomes the critical priority in this precision-based industry. Swagelok is here to answer your questions regarding the selection of ultrahigh-purity products and leak-free assembly services required for semiconductor cleanroom design. 

Parameters Important for Semiconductor Cleanroom Designs

All semiconductor fabs require a specialized environment that is enclosed and controlled to allow for contaminant-free engineering of the wafers. These cleanrooms are designed to have control over factors such as airflow, particle size and concentration, temperature, humidity, UV lighting, and other attributes that affect assembly. The main aim is to reduce contamination, as even a small speck of particulate matter can adversely affect the chip’s functioning.

Most semiconductor cleanrooms opt for ISO Class 4 or lower design specification, which means a maximum of 3250 particles per cubic meter of size 0.5μm or lower. When designing these cleanrooms, one should be aware that the potential contamination factors can include regular intervention—resulting from handling equipment for temperature and flow control.

Understanding the potential effect of toxic gasses resulting from working with exotic metals and chemicals is also important. Providing a high-quality flow system with thermal insulation for the fluid process system means improved stability of the cleanroom system, enhanced safety, and reduced chances of contamination. 

Thermal Management for Fluid Distribution System 

The chip fabrication in the cleanroom uses specialized gasses such as hydrogen, nitrogen, oxygen, or argon to ensure ultrahigh-purity at different manufacturing stages. This requires a high-quality fluid delivery system that is reliable—i.e., leak-free, and has ideal thermal management and flow control capabilities. Poor components in the system can invite many issues. Common issues are listed below:

1. Multiple fittings and incompatible hoses at extreme ends of fluid temperature can increase the risks of leaks and failure.
2. A poor-quality hose without proper insulation can cause a change in fluid temperature desired for the process that requires strict thermal stability.
3. Lack of temperature control means the fluid can cause burns or energy loss at high temperatures, while low temperatures can freeze the condensate.
4. The desired reaction cannot be achieved without fluid reaching the ideal temperature.
5. Constant leaks and maintenance allow contaminants to enter the cleanroom, which minimizes the quality of the fabricated semiconductor.  
6. The leaked gas can be toxic or reactive or even pyrophoric.

Semiconductor OEMs will require an expert understanding of the gas distribution system to identify potential problems, so the temperature control of the fluid system can be optimized, and the right components used that meet the desired fabrication standards.  

Swagelok Provides the Right Fluid Product for Cleanroom Designs

Semiconductor fabs in Northern California can benefit from Swagelok’s wide range of customizable components and assembly services. Our fluid product components, such as hoses, can resist extreme temperatures and are well insulated to limit the heat loss from the fluid. Our FX series hoses made of 316L stainless steel can function at a temperature range from -328°F to 998°F (-200°C to 537°C), and resist pressure up to 6000psig. The insulated hoses and tubes can be used in steam supply or condensation lines, limiting heat loss and protecting the gas delivery system.

Similarly, if you are concerned about the thermal management of your semiconductor cleanroom design, you can leverage the advantage of working with a local team of skilled assembly experts at Swagelok. Our team of experts will analyze your gas distribution system, analyze the existing parameters, and recommend the change of components or design that best suits your productivity and efficiency needs.

You will not require constant maintenance with an ideal system design with high-quality components. In addition, with the ability to control fluid delivery to your semiconductor fab without constant interference, the purity of your cleanroom and the integrity of the semiconductor can be preserved. 

To find out more about how Swagelok Northern California can help you assemble the ideal fluid distribution system for your semiconductor clean room design, contact our team today by calling 510-933-6200.

About Morgan Zealear| Technical Services Manager

Morgan holds a Bachelor of Science in mechanical engineering from University of California at Santa Barbara. He is certified in Section IX, Grab Sample Panel Configuration and Mechanical Efficiency Program Specification (API 682), and he is well versed in B31.3 Process Piping Code. Before joining Swagelok Northern, he was a manufacturing engineer at Sierra Instruments, primarily focused on capillary thermal meters for the semiconductor industry (ASML).