Swagelok Diaphragm Valves for Atomic Layer Deposition (ALD)

Get the Swagelok Northern California Resource Collection including technical reports, case study, and catalog

Swagelok ALD Diaphragm Valves offer ultrahigh cycle life, high-speed actuation, and flow coefficients up to 0.62, along with thermal actuators, position sensors, and solenoids for optimal performance in atomic layer deposition applications.

The catalog covers our ALD valves' ultrahigh cycle life with high-speed actuation, Cv range from 0.27 to 0.62, up to 392°F (200°C) capability with thermal actuators, electronic actuator position-sensing option, suitability for ultrahigh-purity applications with 316L VIM-VAR stainless steel, and VCR^®, tube butt weld, and 1.125 in. and 1.5 in. modular surface-mount end connections.

The technical report included in this download covers helium seat leak testing, valve flow consistency analysis, lab cycle testing, actuator thermal isolation and valve thermal response, particle counting, surface finish, moisture analysis, hydrocarbon analysis, and pneumatic actuation response.

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