Specialized services and products for semi customers
Swagelok has advanced semi innovation with ALD diaphragm valves tested to 100 million cycles, springless diaphragm valves, fluoropolymer valves, and more.
At the source
With Swagelok, gain greater thermal control, prevent contamination, and promote safe containment.
In the gas box
With Swagelok, shorten purge times, lengthen service life, and switch chemical delivery with optimal control.
At the point of use
With Swagelok, achieve precision high temperature chemical delivery, greater dosing accuracy, and cleanliness.
With Swagelok, purge excess chemistries, maintain optimum pressure, and command efficiency in the final stage of the process.
Customer case studies
Learn about our collaboration with a chemical and specialty component manufacturer in the semiconductor industry.
When Cambridge NanoTech Inc. first started manufacturing atomic layer deposition (ALD) systems in 2003, the company was experiencing downtime due to underperforming valves. To extend the life of Cambridge NanoTech’s ALD gas delivery assemblies, the company tried the Swagelok ALD valve—with great success.
The Research and Development Department of a major semiconductor manufacturer was thriving, but they ran into a tricky deadline with the creation of a panel assembly for an expansion project. If they couldn’t find a solution in time to meet the deadline, the department’s expansion would be halted. Learn about the collaboration.
Our team of certified assembly technicians can build assemblies or subassemblies using Swagelok components, as well as other system components, to meet your design specifications.
Award winning innovation
Gases and Instrumentation Magazine awarded Swagelok the Golden Gas for its Atomic Layer Deposition (ALD) Diaphragm valve. Their praise:
"The pneumatically actuated ALD series valve has a cycle actuation time of less than 5 milliseconds and a cycle life of greater than 25 million cycles. Employs a flow setting feature that ensures valve-to-valve flow (CV) variability of +/- 3 percent. Exceeds SEMI standards for UHP cleanliness and seal integrity. Available options include a high-temperature model, electronic sensor option, and others."
Award winning service
Swagelok received the Lam Research's Supplier Excellence Award. Lam rewards outstanding performance, commitment, and collaboration.
- Swagelok Tube Fitting Safety Seminar
- VCR Metal Gasket Face Seal Fitting Installation
- Tube Bending Training
- Introduction to Gas System Components
- Valve Selection Training
- Valve Installation and Maintenance
Get in touch
Use the form on this page to get in touch. Doing so creates no obligation.