Swagelok ALD & DE Diaphragm Valves

Get details on Swagelok valves for Atomic Layer Deposition (ALD) and Springless Diaphragm Valves (1.125 in.) for Modular Gas Systems

Fulfill your high-purity or ultrahigh-purity system needs with Swagelok diaphragm-sealed valves, which are available in a wide variety of sizes, materials, and configurations for a range of applications.

Gases and Instrumentation Magazine awarded Swagelok the Golden Gas for its Atomic Layer Deposition (ALD) Diaphragm valve. Their review of the valve notes that, "the pneumatically actuated ALD series valve has a cycle actuation time of less than 5 milliseconds and a cycle life of greater than 25 million cycles."

Swagelok ALD diaphragm valves offer ultrahigh cycle life, high-speed actuation, and flow coefficients up to 0.62, along with thermal actuators, position sensors, and solenoids for optimal performance in atomic layer deposition applications.

Swagelok Springless Diaphragm Valves (1.125 in.) for Modular Gas Systems offer high cycle life at an affordable price. The diaphragm is optimally designed for cycle life and flow with a unique weld isolation ring for enhanced cycle life and a high integrity seal. And its fully contained PFA seat design provides enhanced purity and thermal stability, minimal particle generation, and long cycle life.

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