Access the Swagelok ALD Diaphragm Valve Catalog, Two Technical Reports, and an ALD Valve Customer Success Story
Swagelok ALD diaphragm valves offer ultrahigh cycle life, high-speed actuation, and flow coefficients up to 0.62, along with thermal actuators, position sensors, and solenoids for optimal performance in atomic layer deposition applications.
Customer Success Story
Swagelok ALD valves enabled Cambridge NanoTech and its customers to dramatically reduce the overall cost of ownership for Atomic Layer Deposition processing
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