Swagelok Thermal-Immersion Diaphragm Valves (DH Series)

Swagelok thermal-immersion diaphragm valves offer high-speed actuation, flow coefficients up to 0.60, and optimum performance at 220°C (428°F) for high-temperature processes including atomic layer deposition (ALD) and precursor delivery applications. They are offered in both pneumatically actuated and manual models with a variety of 1/4 and 3/8 in. end connections.

• Maximized flow capacity
• Fully immersible at temperature
• Normally closed pneumatic actuation means it's capable of valve opening or closing times of less than 5 ms; manual actuation with a lock-out handle; and fully contained high-purity grade PFA seat offers broad range of chemical compatibility and excellent resistance to swelling and contamination
• Fully swept flow path minimizes entrapment and facilitates purging

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