Semiconductor Fab Energy Consumption: Reinvesting in Your Equipment Can Lead to Big Savings

Back in 1965, the co-founder of Intel, Gordon E. Moore, made an observation about computers which is popularly known as Moore’s Law. In simple terms, the law states, “the number of transistors on a microchip doubles about every two years, though the cost of computers is halved.”

The semiconductor industry is constantly striving hard to keep up with this paradigm.

Chips are getting smaller by the day to make space for more transistors for double the computing power. Technology has advanced from 200-300 mm silicon wafers to 5 nm chip production. However, in doing so, semiconductor fabs need components that can keep up with the speed of innovation while keeping semiconductor fab energy consumption in control.

Challenges within the Semiconductor Fabrication Process

Chip fabrication is an extremely temperature-sensitive process. To ensure process stability, fabs need to optimize the deposition chamber temperature without adding any risk or additional process cost to the operation. To optimize temperature, fabs pump coolants in and out through chambers using powerful chillers, supported by additional equipment. If the equipment doesn’t have the required level of insulation, coolants may fail at their purpose by absorbing outside heat through conduction during the transportation. 

For instance, coolants such as glycol can reach as low as -40°F (-40°C) and better temp control fluid lines if traveling through insulated hoses designed specifically for cold applications. 

Minimizing the cost of fugitive emissions and associated carbon footprint is another major concern for semiconductor industries. Fugitive emissions involve the accidental release of volatile organic compounds (VOCs) such as benzene, methane, and ethanol into the atmosphere, degrading air quality and the ozone layer in the long run. Thus, optimizing semiconductor fab energy consumption is necessary to avoid penalties from regulating bodies such as the Environmental Protection Agency (EPA). 

Failure to address these issues may present a challenge to fab yield in terms of compromised fab environment, equipment failure, downtime, and delayed production.

Optimize Semiconductor Fab Energy Consumption with the Right Equipment

Running an analysis of the existing process system to identify an opportunity for reinvesting in your equipment could be very beneficial. Here are some potential areas of thermal management where Swagelok, a provider of high-quality fluid system components and support to semiconductor tool manufacturers and chip fabricators, excels.

Valves

Swagelok ultrahigh-purity atomic layer deposition (ALD) valves maximize production process efficiencies and thermal stability. The 316L stainless-steel body offers corrosion resistance even with aggressive media under a wide temp range of 50°F to 390°F (10°C to 200°C).

Weld Fittings

Checking your weld fittings against elevated-temperature pressure ratings is imperative to avoid fugitive emissions and system heat loss. Semiconductor fabs refer to process piping standards ASME B31.3 and ASME B31.1 to comply with required regulations within their jurisdiction. Swagelok ultra-high purity weld fittings are designed in accordance with the same ASME piping codes. They are 316L VIM-VAR Micro-Fit stainless steel to offer reliable pressure ratings from -18°F to 998°F (-28°C to 537°C).

Hoses

Swagelok offers a wide variety of hoses with custom core materials, including metal, PTFE, PFA, vinyl, nylon, polyethylene, and rubber. The choice of insulation depends on the process condition. For example, a hose with a polyolefin heat shrink cover is more ideal for cold applications than hot fluid applications that require fabric coverings. Swagelok offers a variety of insulated hose options to meet your temperature requirements.

Regulators

Selecting the right regulator matters for a system’s safe and efficient operations. The ideal regulator should be designed to withstand the necessary temperature. Swagelok regulators can be customized to operate in a wide variety of temperatures. For example, our diaphragm-sensing pressure-reducing PCTFE seat regulators can perform at 176°F (80°C) and can go up to 392°F (200°C) with a PEEK seat customization. 

Searching for ways to optimize semiconductor fab energy consumption on your own can be overwhelming. Therefore, it is imperative to partner with a fluid system component supplier who understands the unique needs for critical applications and has a successful track record for developing custom fluid system solutions.

Leverage the Right Equipment and Expert Advice to Optimize Semiconductor Fab Energy Consumption  

When you have specialized needs, going for off-the-shelf products isn’t the best option. You should work with partners who can help with product selection, custom-design products, and offer technical support to meet specific performance standards. 

Swagelok has been helping semiconductor manufacturers in Northern California overcome thermal management challenges for the last 50 years. Our expert teams offer you local support to assess, analyze, and recommend custom fluid management solutions to address high temp environments with ease. They can also help you meet the standards required to keep emissions under control. 

Swagelok has the required engineering capabilities and collaborative mindset to help you optimize semiconductor fab energy consumption and more.

To find out more about how Swagelok Northern California can help you with cutting down semiconductor fab energy consumption, contact our team today by calling 510-933-6200.

About Morgan Zealear | Product Engineer, Assembly Services

Morgan holds a Bachelor of Science in Mechanical Engineering from the University of California at Santa Barbara. He is certified in Section IX, Grab Sample Panel Configuration, and Mechanical Efficiency Program Specification (API 682), and he is well versed in B31.3 Process Piping Code. Before joining Swagelok Northern, he was a manufacturing engineer at Sierra Instruments, primarily focused on capillary thermal meters for the semiconductor industry (ASML).