Semiconductor Fab Temperature: Thermal Management Solutions for Your Manufacturing Process

The semiconductor fabrication environment must be sterile—even a single outside particulate could ruin production. When many think of the semiconductor fabrication process, the spotless clean room and operators wearing sterile suits often come to mind. Yet, semiconductor fab temperature is an equally vital aspect of fabrication.

The temperature during fabrication is important for several reasons related to the materials, the phase of matter of the materials, and the adhesion of each layer to another. This article describes the importance of temperature during the fabrication process, thermal management solutions to control semiconductor fab temperature, and how Swagelok Northern California can provide the expertise to help.

The Role of Temperature in Semiconductor Fabrication

Temperature—and the thermal management solutions needed to control temperature—plays an important role in several aspects of the semiconductor fabrication process, including:

• Burn-in: The burn-in testing of integrated circuits requires temperature to be controlled for an accurate reading.
• Etching: Selectively removing material from a thin layer on a substrate requires the temperature to stay within the required range. 
• Chemical vapor deposition and atomic layer deposition: Semiconductor fabrication involves the use of ultra-high purity gasses that are composed of electronic specialty gasses. These specialty gasses are key to processes such as chemical vapor deposition and atomic layer deposition. High temperatures must be maintained for deposition to occur.  
• Wafer fabrication: Wafer fabrication requires process heat to be within tightly defined thresholds.
• Value temperature regulation: Semiconductor fabrication requires constant metering of substances and the fabrication process. Maintaining temperature ensures that these measurements are consistent.
• Avoiding corrosive build-up: Poor temperature regulation will result in corrosive build-up
• Lithography: Temperature and humidity in the clean room must be controlled.

It is clear that temperature must be considered during semiconductor fabrication. But what are the methods and solutions for thermal management?

Thermal Management Solutions for Semiconductor Fabrication

Precise thermal management involves both top-of-the-line equipment and methods to effectively monitor temperature. The thermal management solutions listed and discussed below will provide the means to run a successful semiconductor manufacturing operation.

Insulation for Thermal Regulation

The pipes in a clean room require thermal insulation. This insulation prevents the loss of heat and allows the substances to maintain their necessary temperature for semiconductor fabrication. Further, insulation reduces condensation and sweating of pipes which is beneficial for both temperature and humidity control.

Bundled insulated lines

By insulating and bundling cables together, semiconductor fab temperature can be further controlled. The packed cables can be placed in a restricted area to limit heat dissipation. Insulating bundled lines with fibrous glass insulation or protective coverings like PVC or urethane is also highly effective for limiting heat dissipation.

Gas Control Systems

During semiconductor manufacturing, the flow of gas must be precisely controlled. Poor control of gas will result in pressure and temperature issues.

Valves and Fittings

Valves and tube fittings must be precise or risk heat dissipation as substances move through lines.

Heat Tracing

Heating trace technology uses a self-regulating polymer. This polymer controls the wattage of an element that runs alongside pipes and vessels. Increasing temperature results in the polymer separating and the electric current decreases. Decreasing temperature results in the polymer condenses allowing the electric current to increase and temperature to rise.

Heat Sensors and Temperature Measurement

Contact and non-contact temperature and flow measurement devices are used throughout semiconductor manufacturing. The decision of when to use contact or non-contact temperature measurement devices depends on the impact of contact for the fabrication step and the potential reaction between substances used in fabrication and the measurement device.

Heaters

Heating units are necessary to control the temperature. These units are designed to offer precision control over the temperature. They can be made out of such materials as silicone rubber, polyimide film, or mica sheets. These materials offer temperature control and reduced risk of particulates. Ideal heaters have very low outgassing, an even heat distribution when utilized, and superb heat transfer to the heat sink. Heaters should also come with integrated sensors and flex circuits to provide optimal temperature control.

Installing and implementing these thermal management solutions will provide a clear benefit by limiting errors in production due to temperature issues. Updating and implementing these solutions while production is ongoing can be tricky. Luckily, the experts at Swagelok Northern California can help you mitigate thermal management challenges. 

Mitigate Thermal Management Challenges with Swagelok Northern California

Swagelok has been helping semiconductor manufacturers in Northern California overcome thermal management challenges for the last 50 years. We have a team of experts, qualified to offer you onsite local support to assess, analyze, and recommend custom thermal management solutions to address temperature needs with ease.

For example, our top-of-the-line sensors will be able to detect small changes in flow and temperature and alert operators to make the necessary adjustments. Our insulated and bundled lines will help prevent heat dissipation. Take a look at some of our offerings below:

You might be wondering how you can implement this equipment with little to no downtime. Our team of experts can provide a consultation to determine how best to implement and upgrade existing equipment with little to no interruption to production. And, we continue to provide solutions when questions or issues arise after implementing our equipment.

To find out more about how Swagelok Northern California can help you with orbital welding training for stainless steel tubing, contact our team today by calling 510-933-6200.

About Morgan Zealear | Product Engineer, Assembly Services

Morgan holds a Bachelor of Science in Mechanical Engineering from the University of California at Santa Barbara. He is certified in Section IX, Grab Sample Panel Configuration, and Mechanical Efficiency Program Specification (API 682), and he is well versed in B31.3 Process Piping Code. Before joining Swagelok Northern, he was a manufacturing engineer at Sierra Instruments, primarily focused on capillary thermal meters for the semiconductor industry (ASML).