How To Mitigate Semiconductor Manufacturing Hazards in Your Northern California Facility

Semiconductor manufacturing involves sophisticated processes such as photolithography, deposition, etching, cleaning, and doping. Ensuring worker safety becomes a challenge as the process deals with many toxic chemicals that can pose health hazards. It is imperative to mitigate semiconductor manufacturing hazards, as quickly as possible, and know the potential hotspots to stop them at the source.

Chemicals Used in the Semiconductor Manufacturing Process 

A variety of chemical substances are used in the semiconductor manufacturing process. The number and amount of chemicals are increasing because of rapid technological developments in the industry. Although most chemical substances used in a semiconductor manufacturing factory are known to be harmful, it is difficult to obtain hazard information for all chemicals because of the use of trade secrets.

One study was able to identify some of the most commonly used chemicals with data provided directly by a company with a large market share of the worldwide semiconductor industry. The study revealed that semiconductor manufacturers deal with many caustic and carcinogenic chemicals to etch and process silicon wafers. Some examples of such toxic chemicals are acetone, chloroform, silane, phosgene, sulfuric acid, catechol, and naphthalene. They can significantly affect human psychology and may even cause reproductive harm.

These chemicals can also create harmful gaseous byproducts such as ozone, carbon monoxide, and phosgene during the manufacturing process. Their accidental leakage from valves and fittings can directly impact the skin and eyes of workers. In most cases, subjects also feel headaches and have digestion issues, at the least.

Some toxic gasses like arsine, diborane, and silane are also explosive and flammable in nature. Their accidental release may not only put the plant in danger but also cause environmental issues. 

Identifying Other Potential Hotspots of Danger 

Compressed Air

The semiconductor lab requires the highest standard of compressed air purity in a zero-contaminated clean room. Such clean rooms require Class 0 oil-free air for cleaning chips, placing micro components on the wafer board, and cooling chips during the final process. However, such air compressors, especially the ones running through bottled gas, can be costly if a leak is present. Finding the leakage and ensuring workforce safety until fixation is important.

Source Inlet System

As the name suggests, this is the primary component of gas delivery, connecting the main cylinder to the auxiliary ones through hoses, valves, and tubing. If these components are not compatible with system fluid max/min pressure-temperature parameters, gas may leak through joint portions. 

Gas Panel System 

Its function is to regulate the gas pressure just before the source to keep the flow constant. The setup involves the use of pressure regulators, relief valves, ball valves, series gauges, needle valves, etc. If these components fail to match the fluid parameters, leakage through gaps is inevitable. 

Point of Use

It is the last point of use of gas (e.g., lab benches) before being used for an application. Here, the hazard may surface in terms of pressure regulator creep. A comprehensive evaluation followed by an expert’s advice is mandatory to keep problems at bay. 

Automatic Changeover 

An automatic changeover system enables for a seamless switching of bottles for an uninterrupted gas supply. The design of such a system must take into account several factors such as gas type (inert/oxygen), flow coefficient, pressure control range, maximum inlet pressure, etc. It may lead to system failure and the release of flammable gasses into the atmosphere.

So, apart from identifying the potential hotspots of semiconductor manufacturing hazards, it is also imperative to establish a proper gas safety system in semiconductor manufacturing units. 

How To Mitigate Semiconductor Manufacturing Hazards

Design Considerations

The source inlet must have configurable bottle space for future add-ons. There must be an easy isolation system in action to separate a single or even an entire manifold in the event of any hazard.

The gas panel should facilitate easy installation and quick removal of bottles during emergencies. Also, it must have upstream and downstream pressure indicators for offering a real-time report of any pressure fluctuations.

Moreover, the design of the changeover system and the point-of-use system should be fully assembled using high-quality, leak-tight components for reliable performance. 

Safety Considerations 

A gas distribution system involving hazardous gasses must be thoroughly checked for any leaky joints. It is also imperative to clearly label the components for quick identification during the time of emergencies.

Special attention is necessary to avoid fire hazards due to flammable materials in an oxygen-enriched environment. An oxygen-handling system inevitably has two major elements of fire ignition—oxygen and fuel. Avoiding adding the third element into the mixture, i.e. source of heat, can help you avoid fire hazards with ease. It starts with a careful selection of materials for system design. For instance, stainless steel tubes can be replaced with brass and ceramic tubes whereas the use of flammable oil or grease in the system can be minimized. 

Minimize Semiconductor Manufacturing Hazards with Swagelok 

Swagelok’s team of experts have been helping semiconductor manufacturers in Northern California make careful design considerations for safely handling toxic and flammable gas distribution in their plant. Swagelok Gas Distribution Systems are highly customizable and can be designed with the ideal components for improving operational reliability and safety within your facility.

To rest assured of your facility’s safety, Swagelok also offers Gas Leakage Detection service. With the help of airborne ultrasonic detection equipment, our team identifies all the leaks in your system-from small to large leaks. You get a datasheet containing parts affected along with the issues in detail. This quantitative data helps you curb unwanted hazards and costly downtime maintenance in the long run. 

To find out more about how Swagelok Northern California can help you with identifying semiconductor manufacturing hazards and offer best practices to mitigate them, contact our team today by calling 510-933-6200.

About Morgan Zealear | Product Engineer, Assembly Services

Morgan holds a Bachelor of Science in Mechanical Engineering from the University of California at Santa Barbara. He is certified in Section IX, Grab Sample Panel Configuration, and Mechanical Efficiency Program Specification (API 682), and he is well versed in B31.3 Process Piping Code. Before joining Swagelok Northern, he was a manufacturing engineer at Sierra Instruments, primarily focused on capillary thermal meters for the semiconductor industry (ASML).