System Design for Gases Used in Semiconductor Manufacturing

As the semiconductor market grows, the standards for purity and precision are becoming more and more strict. One of the defining factors for quality semiconductor manufacturing is the gases used in the process. These gases have many roles to play during manufacturing, including:

1. Precision process control
2. Contamination prevention
3. Metallurgical property enhancement

To effectively fulfill these roles, the gas supply and distribution system must be highly efficient. The design of the handling system for gasses used in semiconductor manufacturing must be backed by robust components and a custom assembly to account for the reliable and high-quality production of semiconductors.

Gases Used In Semiconductor Manufacturing

The process of manufacturing semiconductors requires using different gases at different phases, as represented in the table below.  

While common gases such as nitrogen, hydrogen, argon, and helium can be used in their pure form, some processes may require a specialized mixture. Silane or siloxane, hexafluoride, halides, and hydrocarbons are a few specialty gases used in semiconductor manufacturing. Among these gases, many of them can be hazardous or highly reactive, contributing to the challenge of component selection and design of the gas system.

Here are a few examples:

• Hydrogen and helium leak easily from piping and fitting systems due to their low atomic size and weight. 
• Silane is highly flammable and can ignite spontaneously in the air (pyrophoric). 
• Nitrogen difluoride used during deposition, etching, and chamber cleaning phases, can act as a potent greenhouse gas when it leaks into the environment. 
• Hydrogen fluoride, the etching gas, can be highly corrosive to metal piping. 
• Trimethylgallium and ammonia can be difficult to handle—a small fluctuation in their temperature and pressure requirement can affect the deposition process. 

Controlling the process conditions to minimize the negative effects of these gases must be the utmost priority during the system’s design. And during the build, it is just as crucial to use the highest quality components like Swageloks Diaphragm Valves.

Handling The System Design Challenges

Semiconductor-grade gases are high purity in most cases and provide inert conditions or enhanced reactions at different phases of the fabrication process (such as the etching and deposition gases). Leaks or contamination of such gases can have a negative effect. Therefore, it is vital for the system components used to be leak-tight and corrosion-resistant with smooth finishing (electropolished) to ensure there is no potential for contamination—and extreme cleanliness can be maintained. 

Moreover, some of these gases may be heated or cooled to achieve the desired process condition. Well-insulated components can ensure temperature control which is essential for the efficient performance of the final product.

From the source inlet to the point-of-use, Swagelok’s wide range of components supports ultra-high purity, temperature, pressure, and flow rate control required in semiconductor cleanrooms and vacuum chambers. 

Design System With Quality Components In Semiconductor Fabs

The role of quality components and design optimization is critical for precision control and the safe fabrication of semiconductors. The components in use need to be strong and free of leaks to conform to the varying process conditions required at different phases of fabrication. Swagelok’s high-quality valves, fittings, regulators, tubings, and seal supports offer the following features:

• Ultra-high purity
• Leak-free sealing
• Temperature control insulation
• Pressure control
• Corrosion-resistance
• Electropolished finish

In addition, as a local fluid system expert for your northern California facility, Swagelok can also help you evaluate and optimize your existing gas system to enhance its reliability. With the best-fit and high-quality components, your semiconductor manufacturing process is sure to be efficient.

To find out more about how Swagelok Northern California can help you handle the gasses used in semiconductor manufacturing, contact our team today by calling 510-933-6200.

About Morgan Zealear | Product Engineer, Assembly Services

Morgan holds a Bachelor of Science in Mechanical Engineering from University of California at Santa Barbara. He is certified in Section IX, Grab Sample Panel Configuration and Mechanical Efficiency Program Specification (API 682), and he is well versed in B31.3 Process Piping Code. Before joining Swagelok Northern, he was a manufacturing engineer at Sierra Instruments, primarily focused on capillary thermal meters for the semiconductor industry (ASML).