Developing Process Fluid Heat Transfer Systems

Chip fabrication is a critical task requiring microscopic precision, not just in the assembly stage but also in maintaining the process condition in which it is being worked. Process conditions, such as temperature or humidity, need precision and control at many stages of semiconductor manufacturing. Testing and handling equipment need temperature control as they heat up due to constant movement. The wafer also requires uniform heating and cooling to ensure they do not break or incur severe defects.

Process Fluid Heat Transfer Systems in Semiconductor Manufacturing

The success of semiconductor equipment manufacturing can be defined by how effectively its fluid system and thermal management system function. Heat transfer fluids (HTFs) used in many semiconductor manufacturing processes have a wide temperature range.

For instance, petroleum-based hydrocarbon oils can operate at a temperature as low as -90°C and range up to 300°C for high-temperature applications. However, low-quality components may lead to flow discrepancies and loss of temperature profile. These issues lead to equipment overheating and burning at the higher end of the fluid temperature and condensation and freezing at the lower temperature range.

These issues lead to chip damage or, in the worst case, overall system failure. Effective heating or cooling is what manufacturers desire from their process fluid heat transfer systems to avoid the aforementioned issues. The effectiveness can be defined from:

Semiconductor OEMs can consult with local fluid system experts and make use of quality components to develop effective process fluid heat transfer systems. 

Ideal Qualities of Effective Heat Transfer Components

With thermal management being a major concern in semiconductor processing, the components used for transferring process fluid should be insulated and have metallurgical stability.

Insulation

As hoses or tubes come in direct contact with the process fluid, they become the immediate point for heat loss. Insulation of these components helps to maintain the target temperature profile of the process fluid and facilitates effective heat transfer. Insulation also allows them to offset their heating and cooling investment and reduce emissions, improving the overall performance of the manufacturing process. 

Metallurgical Stability

Damage in components occurs when the material selected cannot function with stability at the extreme ends of the temperature. The metallurgical properties of the metals deteriorate, which then gives rise to issues like leaks. At high pressure, such components can fail or cause damage to the supporting equipment. The hose, fittings, valves, or insulation material must be selected to withstand the process conditions and fluid properties.

Swagelok provides a wide range of solutions that address these heat transfer challenges. The available hoses include materials such as stainless steel, PTFE, polyethylene, rubber, and more.

There are also specialized solutions such as:

• FX Series 316L high pressure stainless steel braided hose
• KEV Series Regulator
• N series and NH series needle valves

Partner with Swagelok for Heat Management at Your Manufacturing Facility

Assembling the heat transfer system requires semiconductor OEMs to take a look at cost and quality, not just of the components in use, but also of the ultimate assembled system. Oftentimes, error in design engineering leads to leakage and system failure. By consulting a local expert with expertise in handling the thermodynamic challenges of the fluid, you can develop reliable process fluid heat transfer systems within your limited budget.

Along with providing high-quality components capable of handling heat transfer challenges, Swagelok also provides you with consultation and design assistance services. Whether you need to design a chiller box or an extensive heat transfer system, your Northern California manufacturing facility can trust us to deliver quality and reliability for optimal temperature control. 

To find out more about how Swagelok Northern California can help you develop reliable process fluid heat transfer systems, contact our team today by calling 510-933-6200.

About Morgan Zealear | Product Engineer, Assembly Services

Morgan holds a Bachelor of Science in Mechanical Engineering from University of California at Santa Barbara. He is certified in Section IX, Grab Sample Panel Configuration and Mechanical Efficiency Program Specification (API 682), and he is well versed in B31.3 Process Piping Code. Before joining Swagelok Northern, he was a manufacturing engineer at Sierra Instruments, primarily focused on capillary thermal meters for the semiconductor industry (ASML).